Rod Actuator : ERA 65H

Rod Actuator : ERA 65HHigh rigidity and compact design. 300mm maximum standard stroke. High positioning repeatability 8. Easy maintenance and high reliability. T slot fixation method is used in base for convenient customized fixation with equipment. Base structure low noise type. Easy various motors attachment. Magnetic sensor can be attached. ERA45: The said figures are the reference values prepared based on Mitsubishi HG KR13 (100W) so that they are subject to changes

01 Travel Guide Crossed Roller Bearing Crossed Roller Bearing Crossed Roller Bearing Crossed Roller Bearing Material Aluminum Aluminum Aluminum Aluminum Load Capacity (kg/f) 1 3 4 5 Weight (kg) 0

005 Travel Guide Crossed Roller Bearing Crossed Roller Bearing Crossed Roller Bearing Crossed Roller Bearing Material Aluminum Aluminum Aluminum Aluminum Load Capacity (kg/f) 0

and heavy load can be applied in a wide range

2 Weight (kg) 1

008 Load Capacity(kg) 3 4 4 Motor 5-Phase Stepping(PK523PB) 5-Phase Stepping(PK523PB) 5-Phase Stepping(PK523PB) Sensor 1-Home Sensor

turning the handle while holding the top plate may cause deviation or damages

○ Easy-various motors attachment

Center Z - Stage Type Vertical Vertical Vertical Vertical Stage Surface (mm) 60 X 60 60 X 60 80 X 80 100 X 100 Stroke (mm) ± 6

8 Motor 5-Phase Stepping (PK523PB) 5-Phase Stepping (PK523PB) 5-Phase Stepping (PK523PB) Sensor 1 Home Sensor

01 Travel Guide Crossed Roller Bearing Crossed Roller Bearing Crossed Roller Bearing Crossed Roller Bearing Material Aluminum Aluminum Aluminum Aluminum Load Capacity (kg/f) 1 1 4 4 Weight (kg) 0

210 NOTE1)

96 Applicable Stage - XY S2-6024 (111P) S2-80 (112P) S2-100 (113P) Applicable Stage - Z S6H-60 (139P) S6H-80 (142P) S6H-100 (143P) Applicable Stage - R RDS-60 (206P) RDS-80 (206P) RDS-100 (210P) Applicable Stage - XθYθ G2-60R5084 (215P) G2-80 (214P) G2-100 (214P) Dimension A (mm) 60 80 100 Dimension B (mm) 187 181 229 Dimension C (mm) 13